Corseed^TM is an electrically conductive ceramics originally developed by ASUZAC and recommended as an ESD preventative option. Corseed^TM is such a dense material that it hardly gets dirty, and suited for applications that require cleanliness. Besides, since Corseed^TM has a hardness similar to silicon, it won't scratch wafers. As Corseed^TM is inherently conductive, no conductive coating is required, meaning that Corseed is durable under heated environments.

Arsima^TM is excellent in its low thermal conductivity & expansion and heat shock resistance. Therefore, Arsima^TM is optimized for use as insulators near the heat source to block heat diffusion or the places exposed to some rapid thermal changes. In addition, Arsima^TM is such a light and dense material that it gives no stress on machines and and it is less likely to generate dusts.

ASUZAC's Porous Alumina and SiC ceramics are the materials with countless pores inside and ASUAC can offer varied material suited to your application. As porous material is excellent in its low thermal conductivity and lightweight, it is optimal for use as filters, bubblers, vacuum chucks, air blowing, and more. We have vacuum stages embedded with porous ceramics for 8 to 12 inch wafers. SiC version is suitable for use in harsh environments exposed to rapid thermal change, hydrofluoric acid and other chemicals.

ASUZAC's Black Alumina excels in its low light reflectivity while retaining the mechanical strength and durability of standard alumina. The color of white or ivory can be problematic when used as a component around the light source as it diffuses light and causes flare. Besides, the light source reaches high temperature. ASUZAC's black alumina can withstand 300℃ and suppress surface light reflection

ASUZAC's 4N or four nine - 99.99% alumina is suited for applications where impurities and metal contamination are not allowed. The concentration of the substances including Na, K, Fe, and Ti is around 0.001% ~ 0.003%. 4N is also recommended to application that requires wear-resistance and heat insulation. Compared to normal alumina, 4N is harder and lower in thermal conductivity.

ARW / ARK is a thin alumina substrates molded by the doctor blade and around 1mm thick material can be produced. A number of thin products such as dummy wafers and wafer hands can be processed by laser cutting, and customized along with the drawings from customers. ARW is 99.6% pure and ARK is 96%.